Multilayer X-Ray Mirrors; The State Of The Art.

M P Bruijn; J. Verhoeven; E. Puik; M J van der Wiel

doi:10.1117/12.948770

16 December 1988 Multilayer X-Ray Mirrors; The State Of The Art.

M P Bruijn, J. Verhoeven, E. Puik, M J van der Wiel

Author Affiliations +

Proceedings Volume 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers; (1988) https://doi.org/10.1117/12.948770
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

A review is given of the techniques to produce multilayer coatings for soft X-ray reflection. Current work of the improvements of the energy resolution of these systems is described. The state of the art in the production of imaging objectives is reviewed.

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M P Bruijn, J. Verhoeven, E. Puik, and M J van der Wiel "Multilayer X-Ray Mirrors; The State Of The Art.", Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); https://doi.org/10.1117/12.948770

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