12 May 2016 Miniaturized NIR scanning grating spectrometer for use in mobile phones
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Abstract
An extremely miniaturized scanning grating spectrometer at the size of a sugar cube has been developed at Fraunhofer IPMS. To meet the requirements for the integration into a mobile phone a new system approach has been pursued. The key component within the system is a silicon-based deflectable diffraction grating with an integrated driving mechanism. A first sample of the new spectrometer was built and characterized. It was found to have a spectral range from 950 nm to 1900 nm at a resolution of 10 nm. The results show that the performance of the new MEMS spectrometer is in good agreement with the requirements for mobile phone integration.
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Jens Knobbe, Jens Knobbe, Tino Pügner, Tino Pügner, Heinrich Grüger, Heinrich Grüger, "Miniaturized NIR scanning grating spectrometer for use in mobile phones", Proc. SPIE 9855, Next-Generation Spectroscopic Technologies IX, 985502 (12 May 2016); doi: 10.1117/12.2223759; https://doi.org/10.1117/12.2223759
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