A novel CMOS-compatible, monolithically integrated line-scan hyperspectral imager covering the VIS-NIR range

Pilar Gonzalez; Klaas Tack; Bert Geelen; Bart Masschelein; Wouter Charle; Bart Vereecke; Andy Lambrechts

doi:10.1117/12.2230726

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12 May 2016 A novel CMOS-compatible, monolithically integrated line-scan hyperspectral imager covering the VIS-NIR range

Pilar Gonzalez, Klaas Tack, Bert Geelen, Bart Masschelein, Wouter Charle, Bart Vereecke, Andy Lambrechts

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Proceedings Volume 9855, Next-Generation Spectroscopic Technologies IX; 98550N (2016) https://doi.org/10.1117/12.2230726
Event: SPIE Commercial + Scientific Sensing and Imaging, 2016, Baltimore, Maryland, United States

Abstract

Imec has developed a process for the monolithic integration of optical filters on top of CMOS image sensors, leading to compact, cost-efficient and faster hyperspectral cameras. Different prototype sensors are available, most notably a 600- 1000 nm line-scan imager, and two mosaic sensors: a 4x4 VIS (470-620 nm range) and a 5x5 VNIR (600-1000 nm). In response to the users’ demand for a single sensor able to cover both the VIS and NIR ranges, further developments have been made to enable more demanding applications. As a result, this paper presents the latest addition to imec’s family of monolithically-integrated hyperspectral sensors: a line scan sensor covering the range 470-900 nm. This new prototype sensor can acquire hyperspectral image cubes of 2048 pixels over 192 bands (128 bands for the 600- 900 nm range, and 64 bands for the 470-620 nm range) at 340 cubes per second for normal machine vision illumination levels.

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Pilar Gonzalez, Klaas Tack, Bert Geelen, Bart Masschelein, Wouter Charle, Bart Vereecke, and Andy Lambrechts "A novel CMOS-compatible, monolithically integrated line-scan hyperspectral imager covering the VIS-NIR range", Proc. SPIE 9855, Next-Generation Spectroscopic Technologies IX, 98550N (12 May 2016); https://doi.org/10.1117/12.2230726

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