A novel CMOS-compatible, monolithically integrated line-scan hyperspectral imager covering the VIS-NIR range

Pilar Gonzalez; Klaas Tack; Bert Geelen; Bart Masschelein; Wouter Charle; Bart Vereecke; Andy Lambrechts

doi:10.1117/12.2230726

12 May 2016 A novel CMOS-compatible, monolithically integrated line-scan hyperspectral imager covering the VIS-NIR range

Pilar Gonzalez, Klaas Tack, Bert Geelen, Bart Masschelein, Wouter Charle, Bart Vereecke, Andy Lambrechts

Author Affiliations +

Proceedings Volume 9855, Next-Generation Spectroscopic Technologies IX; 98550N (2016) https://doi.org/10.1117/12.2230726
Event: SPIE Commercial + Scientific Sensing and Imaging, 2016, Baltimore, Maryland, United States

Abstract

Imec has developed a process for the monolithic integration of optical filters on top of CMOS image sensors, leading to compact, cost-efficient and faster hyperspectral cameras. Different prototype sensors are available, most notably a 600- 1000 nm line-scan imager, and two mosaic sensors: a 4x4 VIS (470-620 nm range) and a 5x5 VNIR (600-1000 nm). In response to the users’ demand for a single sensor able to cover both the VIS and NIR ranges, further developments have been made to enable more demanding applications. As a result, this paper presents the latest addition to imec’s family of monolithically-integrated hyperspectral sensors: a line scan sensor covering the range 470-900 nm. This new prototype sensor can acquire hyperspectral image cubes of 2048 pixels over 192 bands (128 bands for the 600- 900 nm range, and 64 bands for the 470-620 nm range) at 340 cubes per second for normal machine vision illumination levels.

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Pilar Gonzalez, Pilar Gonzalez, Klaas Tack, Klaas Tack, Bert Geelen, Bert Geelen, Bart Masschelein, Bart Masschelein, Wouter Charle, Wouter Charle, Bart Vereecke, Bart Vereecke, Andy Lambrechts, Andy Lambrechts, "A novel CMOS-compatible, monolithically integrated line-scan hyperspectral imager covering the VIS-NIR range", Proc. SPIE 9855, Next-Generation Spectroscopic Technologies IX, 98550N (12 May 2016); doi: 10.1117/12.2230726; https://doi.org/10.1117/12.2230726

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