5 May 2016 Silicon technologies for arrays of Single Photon Avalanche Diodes
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In order to fulfill the requirements of many applications, we recently developed a new technology aimed at combining the advantages of traditional thin and thick silicon Single Photon Avalanche Diodes (SPAD). In particular we demonstrated single-pixel detectors with a remarkable improvement in the Photon Detection Efficiency in the red/nearinfrared spectrum (e.g. 40% at 800nm) while maintaining a timing jitter better than 100ps. In this paper we discuss the limitations of such Red-Enhanced (RE) technology from the point of view of the fabrication of small arrays of SPAD and we propose modifications to the structure aimed at overcoming these issues. We also report the first preliminary experimental results attained on devices fabricated adopting the improved structure.
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Angelo Gulinatti, Angelo Gulinatti, Francesco Ceccarelli, Francesco Ceccarelli, Ivan Rech, Ivan Rech, Massimo Ghioni, Massimo Ghioni, "Silicon technologies for arrays of Single Photon Avalanche Diodes", Proc. SPIE 9858, Advanced Photon Counting Techniques X, 98580A (5 May 2016); doi: 10.1117/12.2223884; https://doi.org/10.1117/12.2223884

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