Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 9868, including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.

The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. Additional papers and presentation recordings may be available online in the SPIE Digital Library at SPIEDigitalLibrary.org.

The papers reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon.

Please use the following format to cite material from these proceedings:

Author(s), “Title of Paper,” in Dimensional Optical Metrology and Inspection for Practical Applications V, edited by Kevin G. Harding, Song Zhang, Proceedings of SPIE Vol. 9868 (SPIE, Bellingham, WA, 2016) Six-digit Article CID Number.

ISSN: 0277-786X

ISSN: 1996-756X (electronic)

ISBN: 9781510601093

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Copyright © 2016, Society of Photo-Optical Instrumentation Engineers.

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Paper Numbering: Proceedings of SPIE follow an e-First publication model. A unique citation identifier (CID) number is assigned to each article at the time of publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online and print versions of the publication. SPIE uses a six-digit CID article numbering system structured as follows:

  • The first four digits correspond to the SPIE volume number.

  • The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. These two-number sets start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B … 0Z, followed by 10-1Z, 20-2Z, etc. The CID Number appears on each page of the manuscript.

Authors

Numbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B...0Z, followed by 10-1Z, 20-2Z, etc.

Amiri, Javad, 04

Arguello, Henry, 0A

Bell, Tyler, 03

Boeckmans, Bart, 05, 0G

Brahm, Anika, 0C

Darudi, Ahmad, 04, 0H

Dewulf, Wim, 05, 0G

Dhadwal, Harbans S., 0I

Díaz, Elkin, 0A

Dietrich, Patrick, 0C, 0F

Dong, Liquan, 0J

Duong, Kiet, 02

Feng, Dake, 0I

Han, Jie, 06

Harding, Kevin G., 06, 0B, 0D

Heist, Stefan, 0C, 0F

Hirsch, Michael, 09

Hui, Mei, 0J

Jiang, Chufan, 0E

Kruth, Jean-Pierre, 05, 0G

Kühmstedt, Peter, 0C, 0F

Leake, Skye, 09

Liu, Ming, 0J

Liu, Xiaohua, 0J

Lutzke, Peter, 0F

McGuire, Thomas, 09

Moradi, Ali Reza, 04

Nehmetallah, Georges, 02, 04, 0H

Nguyen, Thanh C., 02, 0H

Notni, Gunther, 0C, 0F

Parsons, Michael, 09

Probst, Gabriel, 05, 0G

Ramamurthy, Rajesh, 06

Rastegar, Jahangir, 0I

Rößler, Conrad, 0C

Schmidt, Ingo, 0F

Soltani, Peyman, 04, 0H

Straub, Jeremy, 09

Tait, Robert, 0B

Thai, Anh, 02

Tran, Dat, 02, 0H

Xia, Zhengzheng, 0J

Yang, Dongmin, 06

Zhai, Zirong, 06

Zhang, M., 05

Zhang, Song, 03, 0E

Zhao, Yuejin, 0J

Conference Committee

Symposium Chair

  • Ming C. Wu, University of California, Berkeley (United States)

Symposium Co-chair

  • Majid Rabbani, Eastman Kodak Company (United States)

Conference Chairs

  • Kevin G. Harding, GE Global Research (United States)

    Song Zhang, Purdue University (United States)

Conference Co-chair

  • Edward W. Reutzel, Applied Research Laboratory (United States)

    Conference Program Committee

  • Yasuhiko Arai, Kansai University (Japan)

    Harbans S. Dhadwal, Omnitek Partners, LLC (United States)

    Khaled J. Habib, Kuwait Institute for Scientific Research (Kuwait)

    Katsuichi Kitagawa, Consultant (Japan)

    Peter Kühmstedt, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)

    Georges Nehmetallah, The Catholic University of America (United States)

    Yukitoshi Otani, Utsunomiya University (Japan)

    Takamasa Suzuki, Niigata University (Japan)

    Joseph D. Tobiason, Micro Encoder Inc. (United States)

    Jiangtao Xi, University of Wollongong (Australia)

    Toru Yoshizawa, NPO 3D Associates (Japan)

Session Chairs

  • 1 Optical Metrology Analysis

    Kevin G. Harding, GE Global Research (United States)

  • 2 Optical Metrology Applications

    Edward W. Reutzel, Applied Research Laboratory (United States)

  • 3 Optical Metrology Methods

    Georges Nehmetallah, The Catholic University of America (United States)

    Song Zhang, Purdue University (United States)

© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
} "Front Matter: Volume 9868", Proc. SPIE 9868, Dimensional Optical Metrology and Inspection for Practical Applications V, 986801 (28 September 2016); doi: 10.1117/12.2244097; https://doi.org/10.1117/12.2244097
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