Fabrication of controllable form submicrometer structures on positive photoresist by one-photon absorption direct laser writing technique

Quang Cong Tong; Minh Thanh Do; Bernard Journet; Isabelle Ledoux-Rak; Ngoc Diep Lai

doi:10.1117/12.2225942

18 April 2016 Fabrication of controllable form submicrometer structures on positive photoresist by one-photon absorption direct laser writing technique

Quang Cong Tong, Minh Thanh Do, Bernard Journet, Isabelle Ledoux-Rak, Ngoc Diep Lai

Author Affiliations +

Proceedings Volume 9885, Photonic Crystal Materials and Devices XII; 988519 (2016) https://doi.org/10.1117/12.2225942
Event: SPIE Photonics Europe, 2016, Brussels, Belgium

Abstract

We demonstrate a very simple and low-cost method based on one-photon absorption direct laser writing technique to fabricate arbitrary two-dimensional (2D) polymeric submicrometer structures with controllable form. In this technique, a continuous-wave green laser beam (532 nm) with very weak power is tightly focused into a positive photoresist (S1805) by a high numerical aperture (NA) objective lens (OL), depolymerizing the polymer in a local submicrometer region. The focusing spot is then moved in a controllable trajectory by a 3D piezo translation stage, resulting in desired structures. The low absorption effect of the photoresist at the excitation wavelength allows obtaining structures with submicrometer size and great depth. In particular, by controlling the exposure dose, e.g. the scanning speed, and the scanning configuration, the structures have been created in positive (cylindrical material in air) or negative (air holes) form. The 2D square structures with periods in between 0.6 μm and 1 μm and with a feature size of about 150 nm have been demonstrated with an OL of NA = 0.9 (air-immersion). The fabricated results are well consistent with those obtained numerically by using a vectorial diffraction theory for high NA OLs. This investigation should be very useful for fabrication of photonic and plasmonic templates.

Citation Download Citation

Quang Cong Tong, Quang Cong Tong, Minh Thanh Do, Minh Thanh Do, Bernard Journet, Bernard Journet, Isabelle Ledoux-Rak, Isabelle Ledoux-Rak, Ngoc Diep Lai, Ngoc Diep Lai, "Fabrication of controllable form submicrometer structures on positive photoresist by one-photon absorption direct laser writing technique", Proc. SPIE 9885, Photonic Crystal Materials and Devices XII, 988519 (18 April 2016); doi: 10.1117/12.2225942; https://doi.org/10.1117/12.2225942

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years