26 April 2016 Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry
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In this paper, we present construction, fabrication and characterization of an electrostatic MOEMS vertical microscanner for generation of an optical phase shift in array-type interferometric microsystems. The microscanner employs asymmetric comb-drives for a vertical displacement of a large 4x4 array of reference micromirrors and for in-situ position sensing. The device is designed to be fully compatible with Mirau configuration and with vertical integration strategy. This enables further integration of the device within an "active" multi-channel Mirau micro-interferometer and implementation of the phase shifting interferometry (PSI) technique for imaging applications. The combination of micro-interferometer and PSI is particularly interesting in the swept-source optical coherence tomography, since it allows not only strong size reduction of a system but also improvement of its performance (sensitivity, removal of the image artefacts). The technology of device is based on double-side DRIE of SOI wafer and vapor HF releasing of the suspended platform. In the static mode, the device provides vertical displacement of micromirrors up to 2.8μm (0 - 40V), whereas at resonance (fo=500 Hz), it reaches 0.7 μm for only 1VDC+1VAC. In both operation modes, the measured displacement is much more than required for PSI implementation (352nm peak-to-peak). The presented device is a key component of array-type Mirau micro-interferometer that enables the construction of portable, low-cost interferometric systems, e.g. for in vivo medical diagnostics.
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Sylwester Bargiel, Sylwester Bargiel, Justine Lullin, Justine Lullin, Patrice Lemoal, Patrice Lemoal, Stéphane Perrin, Stéphane Perrin, Nicolas Passilly, Nicolas Passilly, Jorge Albero, Jorge Albero, Luc Froehly, Luc Froehly, Franck Lardet-Vieudrin, Franck Lardet-Vieudrin, Christophe Gorecki, Christophe Gorecki, } "Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry", Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 98900D (26 April 2016); doi: 10.1117/12.2230487; https://doi.org/10.1117/12.2230487

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