In this work we present a method for measuring the RMS-values of the surface roughness while simultaneously determining the polishing direction. We are mainly interested in the RMS-values in the range from 0 – 100 nm, which corresponds to the finish categories of A1, A2 and A3. Based on simple intensity measurements we estimates the RMS-value of the surface roughness, and by using a sectioned annual photo-detector to collect the scattered light we can determine the direction of polishing and distinguish light scattered from random structures and light scattered from scratches.
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M. L. Jakobsen, A. S. Olesen, H. E. Larsen, J. Stubager, S. G. Hanson, T. F. Pedersen, H. C. Pedersen, "Sensing roughness and polish direction," Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 98900S (26 April 2016);