Systemic errors calibration in dynamic stitching interferometry

Xin Wu; Te Qi; Yingjie Yu; Linna Zhang

doi:10.1117/12.2231397

16 May 2016 Systemic errors calibration in dynamic stitching interferometry

Xin Wu, Te Qi, Yingjie Yu, Linna Zhang

Author Affiliations +

Proceedings Volume 9890, Optical Micro- and Nanometrology VI; 98900Z (2016) https://doi.org/10.1117/12.2231397
Event: SPIE Photonics Europe, 2016, Brussels, Belgium

Abstract

The systemic error is the main error sauce in sub-aperture stitching calculation. In this paper, a systemic error calibration method is proposed based on pseudo shearing. This method is suitable in dynamic stitching interferometry for large optical plane. The feasibility is vibrated by some simulations and experiments.

Citation Download Citation

Xin Wu, Te Qi, Yingjie Yu, and Linna Zhang "Systemic errors calibration in dynamic stitching interferometry", Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 98900Z (16 May 2016); https://doi.org/10.1117/12.2231397

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