16 May 2016 Systemic errors calibration in dynamic stitching interferometry
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The systemic error is the main error sauce in sub-aperture stitching calculation. In this paper, a systemic error calibration method is proposed based on pseudo shearing. This method is suitable in dynamic stitching interferometry for large optical plane. The feasibility is vibrated by some simulations and experiments.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xin Wu, Xin Wu, Te Qi, Te Qi, Yingjie Yu, Yingjie Yu, Linna Zhang, Linna Zhang, } "Systemic errors calibration in dynamic stitching interferometry", Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 98900Z (16 May 2016); doi: 10.1117/12.2231397; https://doi.org/10.1117/12.2231397

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