The optical device used allows high magnification dimensional surface inspected which allows easy processing and reaches an exceptional nanometric imprecision of measurements. This measurement technique can be used advantageously to measure the deformations generated by constraints on functional parts and the influence of these variations on the function. It can also be used for dimensional control when, for example, to quantify the error as to whether a piece is good or rubbish. It then suffices to compare a figure of moiré fringes with another previously recorded from a piece considered standard, which saves time, money and accuracy. This method of control and measurement allows real time control; speed control and the detection resolution may vary depending on the importance of defects to be measured.
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S. Meguellati, "Precision topographic inspection of MOEMS by moiré interferometry," Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 989013 (26 April 2016);