26 April 2016 Precision topographic inspection of MOEMS by moiré interferometry
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The manufacturing of micro components is useful and necessary for eventual use in the field of MOEMS micro technologies, but, micro fabrication process inspection quality is required. The accuracy of components geometry is parameter which influences the precision of the function. Moiré topography is full-field optical technique in which the contour and shape of object surfaces is measured by means of geometric interference between two identical line gratings. The technique has found various applications in diverse fields, from biomedical to industrial, scientific applications, and miniaturized instrumentation for space applications. This method of optical scanning presented in this paper is used for precision measurement deformation or absolute forms in comparison with a reference component form, of optical or mechanical micro components, on surfaces that are of the order of mm2 and more.

The optical device used allows high magnification dimensional surface inspected which allows easy processing and reaches an exceptional nanometric imprecision of measurements. This measurement technique can be used advantageously to measure the deformations generated by constraints on functional parts and the influence of these variations on the function. It can also be used for dimensional control when, for example, to quantify the error as to whether a piece is good or rubbish. It then suffices to compare a figure of moiré fringes with another previously recorded from a piece considered standard, which saves time, money and accuracy. This method of control and measurement allows real time control; speed control and the detection resolution may vary depending on the importance of defects to be measured.
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S. Meguellati, S. Meguellati, } "Precision topographic inspection of MOEMS by moiré interferometry", Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 989013 (26 April 2016); doi: 10.1117/12.2227051; https://doi.org/10.1117/12.2227051


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