29 April 2016 Development and investigation of MOEMS type displacement-pressure sensor for biological information monitoring
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Abstract
The aim of this paper is to develop and investigate MOEMS displacement-pressure sensor for biological information monitoring. Developing computational periodical microstructure models using COMSOL Multiphysics modeling software for modal and shape analysis and implementation of these results for design MOEMS displacement-pressure sensor for biological information monitoring was performed. The micro manufacturing technology of periodical microstructure having good diffraction efficiency was proposed. Experimental setup for characterisation of optical properties of periodical microstructure used for design of displacement-pressure sensor was created. Pulsating human artery dynamic characteristics in this paper were analysed.
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Vytautas Ostasevicius, Vytautas Ostasevicius, Karolis Malinauskas, Karolis Malinauskas, Giedrius Janusas, Giedrius Janusas, Arvydas Palevicius, Arvydas Palevicius, Elingas Cekas, Elingas Cekas, } "Development and investigation of MOEMS type displacement-pressure sensor for biological information monitoring", Proc. SPIE 9899, Optical Sensing and Detection IV, 98992Q (29 April 2016); doi: 10.1117/12.2228792; https://doi.org/10.1117/12.2228792
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