26 January 2016 Development of a three-dimensional angle errors detection and compensation system for two-dimensional stage
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Proceedings Volume 9903, Seventh International Symposium on Precision Mechanical Measurements; 990309 (2016) https://doi.org/10.1117/12.2212195
Event: Seventh International Symposium on Precision Mechanical Measurements, 2015, Xia'men, China
Abstract
In order to compensate three-dimensional (3D) angle errors of two-dimensional (2D) stage in motion, a 3D angle errors detection and compensation system using a modified DVD pick-up head has been developed in this paper. The modified DVD pick-up head, which consists of a commercial DVD pick-up head without objective lens and voice coil motor, is used as an angle sensor. The mechanism of the angle sensor is based on optical auto-collimation, and each sensor can detect two deflection angles of the stage simultaneously. Utilizing the angle error information obtained by two angle sensors which are set along X and Y moving direction respectively, the controlling system adjusts the nano-positioning stage by controlling the piezoelectric ceramic actuators’ movement to compensate the angle errors of the stage. This system can achieve the measurement and compensation of yaw angle error, pitch angle error and roll angle error of the stage. Experimental results show that the angle detection range of this system is ±110", the resolution is about 0.2", and the repeatability error is about 2″. After compensating, the 3D angle errors of 2D stage can be controlled within 3″. This system has the advantages of compact structure, low cost, etc.
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Qiang-Xian Huang, Ya-Kui Bian, Chen Chen, Rui-Jun Li, "Development of a three-dimensional angle errors detection and compensation system for two-dimensional stage ", Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 990309 (26 January 2016); doi: 10.1117/12.2212195; https://doi.org/10.1117/12.2212195
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