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26 January 2016 Parallel common path phase-shifting interferometer with a digital reflective grating
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Proceedings Volume 9903, Seventh International Symposium on Precision Mechanical Measurements; 99030O (2016) https://doi.org/10.1117/12.2211285
Event: Seventh International Symposium on Precision Mechanical Measurements, 2015, Xia'men, China
Abstract
A parallel common path phase-shifting interferometer is presented using a digital reflective grating realized by a digital micromirror device (DMD). The interferometer based on a modified Michelson architecture is constructed by a beamsplitter, a pinhole mirror, a digital reflective Ronchi grating and two lenses with same focal length to build a 4f optical system. In the interferometer, the pinhole mirror is used to low-filter the input-beam to act as reference beam, and the grating is used to introduce phase shift among +1, 0, and −1 diffraction orders of the input-beam to act as object beam. Then the specimen phase can be reconstructed from the three phase-shifted interferograms recorded in one shot using a normalize algorithm. The theoretical analysis and experiments are carried out to demonstrate the feasibility and accuracy of the proposed method.
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Hongyi Bai, Mingguang Shan, Zhi Zhong, Lili Guo, and Yabin Zhang "Parallel common path phase-shifting interferometer with a digital reflective grating", Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 99030O (26 January 2016); https://doi.org/10.1117/12.2211285
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