The research progress of metrological 248nm deep ultraviolent microscope inspection device

Zhi-xin Wang; Qi Li; Si-tian Gao; Yu-shu Shi; Wei Li; Shi Li

doi:10.1117/12.2211291

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26 January 2016 The research progress of metrological 248nm deep ultraviolent microscope inspection device

Zhi-xin Wang, Qi Li, Si-tian Gao, Yu-shu Shi, Wei Li, Shi Li

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Proceedings Volume 9903, Seventh International Symposium on Precision Mechanical Measurements; 99030Q (2016) https://doi.org/10.1117/12.2211291
Event: Seventh International Symposium on Precision Mechanical Measurements, 2015, Xia'men, China

Abstract

In lithography process, the precision of wafer pattern to a large extent depends on the geometric dimensioning and tolerance of photomasks when accuracy of lithography aligner is certain. Since the minimum linewidth (Critical Dimension) of the aligner exposing shrinks to a few tens of nanometers in size, one-tenth of tolerance errors in fabrication may lead to microchip function failure, so it is very important to calibrate these errors of photomasks. Among different error measurement instruments, deep ultraviolent (DUV) microscope because of its high resolution, as well as its advantages compared to scanning probe microscope restrained by measuring range and scanning electron microscope restrained by vacuum environment, makes itself the most suitable apparatus. But currently there is very few DUV microscope adopting 248nm optical system, means it can attain 80nm resolution; furthermore, there is almost no DUV microscope possessing traceable calibration capability. For these reason, the National Institute of Metrology, China is developing a metrological 248nm DUV microscope mainly consists of DUV microscopic components, PZT and air supporting stages as well as interferometer calibration framework. In DUV microscopic component, the Köhler high aperture transmit condenser, DUV splitting optical elements and PMT pinhole scanning elements are built. In PZT and air supporting stages, a novel PZT actuating flexural hinge stage nested separate X, Y direction kinematics and a friction wheel driving long range air supporting stage are researched. In interferometer framework, a heterodyne multi-pass interferometer measures XY axis translation and Z axis rotation through Zerodur mirror mounted on stage. It is expected the apparatus has the capability to calibrate one dimensional linewidths and two dimensional pitches ranging from 200nm to 50μm with expanded uncertainty below 20nm.

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Zhi-xin Wang, Qi Li, Si-tian Gao, Yu-shu Shi, Wei Li, and Shi Li "The research progress of metrological 248nm deep ultraviolent microscope inspection device", Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 99030Q (26 January 2016); https://doi.org/10.1117/12.2211291

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