Automatic flatness detection system for micro part

Yi Luo; Xiaodong Wang; Zhendong Shan; Kehong Li

doi:10.1117/12.2213910

26 January 2016 Automatic flatness detection system for micro part

Yi Luo, Xiaodong Wang, Zhendong Shan, Kehong Li

Proceedings Volume 9903, Seventh International Symposium on Precision Mechanical Measurements; 99031N (2016) https://doi.org/10.1117/12.2213910
Event: Seventh International Symposium on Precision Mechanical Measurements, 2015, Xia'men, China

Abstract

An automatic flatness detection system for micro rings is developed. It is made up of machine vision module, ring supporting module and control system. An industry CCD camera with the resolution of 1628×1236 pixel, a telecentric with magnification of two, and light sources are used to collect the vision information. A rotary stage with a polished silicon wafer is used to support the ring. The silicon wafer provides a mirror image and doubles the gap caused by unevenness of the ring. The control system comprise an industry computer and software written in LabVIEW Get Kernel and Convolute Function are selected to reduce noise and distortion, Laplacian Operator is used to sharp the image, and IMAQ Threshold function is used to separate the target object from the background. Based on this software, system repeating precision is 2.19 μm, less than one pixel. The designed detection system can easily identify the ring warpage larger than 5 μm, and if the warpage is less than 25 μm, it can be used in ring assembly and satisfied the final positionary and perpendicularity error requirement of the component.

Citation Download Citation

Yi Luo, Xiaodong Wang, Zhendong Shan, and Kehong Li "Automatic flatness detection system for micro part", Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 99031N (26 January 2016); https://doi.org/10.1117/12.2213910

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