While the equipment of Micro-jet wave-guided laser was assembled, high-precision of concentricity and coaxiality between nozzle and cavity are required, which directly or indirectly influent the laser coupling precision of nozzle, the micro-jet stability and the steady length of micro-jet as well. As a result, the measurement of concentricity and coaxiality is important to improve the processing quality of Micro-jet wave-guided laser Through the new digital universal tool microscope measuring both ends of micro nozzle and diameter of nozzle, more resolution the other hand, the backlight detection the edge of nozzle is utilized. When the position of the center of a circle is indirect measured and then find out the concentricity through the uncertainty of the measurement and calculation method. V shaped groove is utilized to make certain its position. Otherwise, digital imaging through setting fixture and the use of new digital universal tool microscope and processed by software, which will cause to reduce measurement human error in tradition, after that, error theory analysis will be carried out, uncertainty theory will be utilized to make the experiment more sure at the same time. Above all, the reliability of data is obtained, compared with the traditional measurement methods are more accurate. Therefore, the processing quality of laser drilling will be enhanced significantly.