The purpose of this study is to develop with low cost, high precision, low contact force micro-CMM that has fiveaxis scanning touch probe. In this study, the measurement performance of the proposed system is enhanced through the use of a rigid aluminum double-arch-bridge structure to support the five-axis scanning touch probe. Furthermore, the reliability of the scanning probe mechanism of three degrees of freedom was analyzed and validated. in addition two axis (A-axis and C-axis) was added on the scanning probe. This design can be achieved independent of measurement, and minimize the dynamic error. In terms of software, a PC-Based controller was integrates five-axis motion systems with the measurement system through a five-axis control card and a data acquisition card. It also completed the functional modules of Set, Manual and Measurement. In the measurement system, we used our own developed coordinate measurement software, with the XYZ platforms system, rotating mechanism and scanning probe to achieve complex surface measurements. The micro-CMM has a working volume the micro-CMM has a working volume of 80×80×40 mm3 , and the overall dimensions is 486 × 486 × 448 mm.