29 July 2016 Modeling of microelectromechanical systems deformable mirror diffraction grating
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Model-based wavefront control methods such as electric field conjugation require accurate optical propagation models to create high-contrast regions in the focal plane using deformable mirrors (DMs). Recently, it has been shown that it is possible to exceed the controllable outer-working angle imposed by the Nyquist limit based on the number of actuators by utilizing a diffraction grating. The print-through pattern on MEMS-based DMs formed during the fabrication process creates both an amplitude and a phase diffraction grating that can be used to enable Super-Nyquist wavefront control. Using interferometric measurements of a DM-actuator, we develop a DM-diffraction grating model. We compare the total energy enclosed in the first diffraction order due to the phase, amplitude, and combined phase-amplitude gratings with laboratory measurements.
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Dan Sirbu, Dan Sirbu, Eugene Pluzhnik, Eugene Pluzhnik, Ruslan Belikov, Ruslan Belikov, } "Modeling of microelectromechanical systems deformable mirror diffraction grating", Proc. SPIE 9904, Space Telescopes and Instrumentation 2016: Optical, Infrared, and Millimeter Wave, 990466 (29 July 2016); doi: 10.1117/12.2232335; https://doi.org/10.1117/12.2232335

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