In this paper we present the tests performed so far, giving a first assessment on the deterministic process definition. In particular, we report on the results achieved on flat samples of D263 and Eagle glass, focusing on the removal function characterization, the micro-roughness evolution and the plate shape variation. |
ACCESS THE FULL ARTICLE
No SPIE Account? Create one
CITATIONS
Cited by 6 scholarly publications.
Mirrors
Distortion
X-ray optics
X-ray optics
X-rays
Finite element methods
Mathematical modeling