In this paper we present the tests performed so far, giving a first assessment on the deterministic process definition. In particular, we report on the results achieved on flat samples of D263 and Eagle glass, focusing on the removal function characterization, the micro-roughness evolution and the plate shape variation.
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M. Civitani, M. Ghigo, J. Hołyszko, G. Vecchi, S. Basso, "Ion beam figuring of thin glass plates: achievements and perspectives," Proc. SPIE 9905, Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray, 990578 (19 July 2016);