Design and study of the mask exchange system based on Delta parallel mechanism

Feifan Zhang; Jianping Wang; Hongfei Zhou; Zengxiang Zhou; Jiaru Chu

doi:10.1117/12.2231879

27 July 2016 Design and study of the mask exchange system based on Delta parallel mechanism

Feifan Zhang, Jianping Wang, Hongfei Zhou, Zengxiang Zhou, Jiaru Chu

Author Affiliations +

Proceedings Volume 9906, Ground-based and Airborne Telescopes VI; 990634 (2016) https://doi.org/10.1117/12.2231879
Event: SPIE Astronomical Telescopes + Instrumentation, 2016, Edinburgh, United Kingdom

Abstract

Mask exchange system is the main part of Multi-Object Broadband Imaging Echellette (MOBIE) on the Thirty Meter Telescope (TMT). The robot is one of the key parts in the mask exchange process. In view of the facts that the scheme the on-board robot is hard to meet the requirements of TMT and the traditional industrial robot is difficult to use in the Mask Exchange System (MEX). The delta parallel mechanism has much advantages such as good dynamic performance, high speed and could integrate a vision recognition system to identify the masks. The design for MEX based on off-board Delta parallel mechanism was proposed in the paper.

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Feifan Zhang, Feifan Zhang, Jianping Wang, Jianping Wang, Hongfei Zhou, Hongfei Zhou, Zengxiang Zhou, Zengxiang Zhou, Jiaru Chu, Jiaru Chu, "Design and study of the mask exchange system based on Delta parallel mechanism", Proc. SPIE 9906, Ground-based and Airborne Telescopes VI, 990634 (27 July 2016); doi: 10.1117/12.2231879; https://doi.org/10.1117/12.2231879

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