Translator Disclaimer
2 September 2016 Long-term stability and temperature variability of Iris AO segmented MEMS deformable mirrors
Author Affiliations +
Long-term stability of deformable mirrors (DM) is a critical performance requirement for instruments requiring open-loop corrections. The effects of temperature changes in the DM performance are equally critical for such instruments. This paper investigates the long-term stability of three different Iris AO PTT111 DMs that were calibrated at different times ranging from 13 months to nearly 29 months prior to subsequent testing. Performance testing showed that only a small increase in positioning errors occurred from the initial calibration date to the test dates. The increases in errors ranged from as little as 1.38 nm rms after 18 months to 5.68 nm rms after 29 months. The paper also studies the effects of small temperature changes, up to 6.2°C around room temperature. For three different arrays, the errors ranged from 0.62–1.42 nm rms/°C. Removing the effects of packaging shows that errors are ≤0.50 nm rms/°C. Finally, measured data showed that individual segments deformed ≤0.11 nm rms/°C when heated.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. A. Helmbrecht, M. He, C. J. Kempf, and F. Marchis "Long-term stability and temperature variability of Iris AO segmented MEMS deformable mirrors", Proc. SPIE 9909, Adaptive Optics Systems V, 990981 (2 September 2016);


The Iris AO S163 X, a 489 actuator, 163 piston...
Proceedings of SPIE (August 11 2009)
MEMS DM development at Iris AO, Inc.
Proceedings of SPIE (February 14 2011)
Performance of a MEMS reflective wavefront sensor
Proceedings of SPIE (February 08 2008)
Real time open loop control of a 1024 actuator MEMS...
Proceedings of SPIE (July 14 2010)
Segmented MEMS deformable-mirror for wavefront correction
Proceedings of SPIE (October 17 2006)
Development of high-order segmented MEMS deformable mirrors
Proceedings of SPIE (February 15 2012)

Back to Top