22 July 2016 Optical tests of the Si immersed grating demonstrator for METIS
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Abstract
Immersed gratings offer several advantages over conventional gratings: more compact spectrograph designs, and by using standard semiconductor industry techniques, higher diffraction-efficiency and lower stray-light can be achieved. We present the optical tests of the silicon immersed grating demonstrator for the Mid-infrared E-ELT Imager and Spectrograph, METIS. We detail the interferometric tests that were done to measure the wavefront-error and present the results of the throughput and stray-light measurements. We also elaborate on the challenges encountered and lessons learnt during the immersed grating demonstrator test campaign that helped us to improve the fabrication processes of the grating patterning on the wafer.
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Tibor Agócs, Ramon Navarro, Lars Venema, Aaldert H. van Amerongen, Ruud W. M. Hoogeveen, Tonny Coppens, Govert Nieuwland, Michiel Rodenhuis, Bernhard R. Brandl, Ramon Vink, "Optical tests of the Si immersed grating demonstrator for METIS", Proc. SPIE 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II, 991215 (22 July 2016); doi: 10.1117/12.2234686; https://doi.org/10.1117/12.2234686
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