22 July 2016 Combined fabrication technique for high-precision aspheric optical windows
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Abstract
Specifications made on optical components are becoming more and more stringent with the performance improvement of modern optical systems. These strict requirements not only involve low spatial frequency surface accuracy, mid-and-high spatial frequency surface errors, but also surface smoothness and so on. This presentation mainly focuses on the fabrication process for square aspheric window which combines accurate grinding, magnetorheological finishing (MRF) and smoothing polishing (SP). In order to remove the low spatial frequency surface errors and subsurface defects after accurate grinding, the deterministic polishing method MRF with high convergence and stable material removal rate is applied. Then the SP technology with pseudo-random path is adopted to eliminate the mid-and-high spatial frequency surface ripples and high slope errors which is the defect for MRF. Additionally, the coordinate measurement method and interferometry are combined in different phase. Acid-etched method and ion beam figuring (IBF) are also investigated on observing and reducing the subsurface defects. Actual fabrication result indicates that the combined fabrication technique can lead to high machining efficiency on manufaturing the high-precision and high-quality optical aspheric windows.
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Hao Hu, Hao Hu, Ci Song, Ci Song, Xuhui Xie, Xuhui Xie, } "Combined fabrication technique for high-precision aspheric optical windows", Proc. SPIE 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II, 99123W (22 July 2016); doi: 10.1117/12.2232220; https://doi.org/10.1117/12.2232220
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