26 October 2016 Effects of ion bombardment on silver/dielectric interfaces with ion assisted e-beam evaporation
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Abstract
Silver thin films were deposited by electron beam evaporation for application as telescope mirrors using a custom PVD chamber from the University of California Observatories Astronomical Coatings Lab. The silver (Ag) surface has been bombarded with different ion conditions prior to and during deposition of subsequent dielectric protective barrier layers by ion assisted electron beam evaporation. Ion source gases including nitrogen and argon are used, and dielectric barrier stacks utilizing silicon nitride and titanium dioxide are deposited onto Ag. We report the effects on mirror stack reflectivity spectra caused by ion bombardment parameters with different gases and different holding-time in vacuum prior to ion bombardment. We suggest that evolving Ag surface morphology and surface plasmon resonance coupling contribute to the changing optical properties of the mirror stack.
Conference Presentation
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David M. Fryauf, David M. Fryauf, Juan J. Diaz Leon, Juan J. Diaz Leon, Andrew C. Phillips, Andrew C. Phillips, Nobuhiko P. Kobayashi, Nobuhiko P. Kobayashi, "Effects of ion bombardment on silver/dielectric interfaces with ion assisted e-beam evaporation", Proc. SPIE 9924, Low-Dimensional Materials and Devices 2016, 99240M (26 October 2016); doi: 10.1117/12.2238741; https://doi.org/10.1117/12.2238741
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