Open Access Paper
23 November 2016 Front Matter: Volume 9927
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 9927, including the Title Page, Copyright information, Table of Contents, and Conference Committee listing.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 9927", Proc. SPIE 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, 992701 (23 November 2016); https://doi.org/10.1117/12.2258081
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KEYWORDS
Fabrication

Silicon

Silicon carbide

Semiconductor lasers

Active optics

Current controlled current source

Nanolithography

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