15 September 2016 Characterization of one-dimensional gratings fabricated by laser-focused atomic deposition
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Abstract
Nanometric lateral standards are essential to nanometrology. Using laser-focused atomic deposition, a one-dimensional (1D) grating has been manufactured. The pitch of the grating is 212.8 nm, which can be traced to the laser wavelength that is accurately locked to the 52Cr atomic resonance transition 7S37P40. In this paper, the uniformity rather than the pitch accuracy of the 1D grating was evaluated using atomic force microscope (AFM). Based on the center-of-gravity method, the average pitch and the nonuniformity of the grating pitch were calculated. The results show that the average pitch of the grating is 213.2 nm which deviates from the design pitch due to the calibration of AFM, and the nonuniformity of the grating is 0.1 nm. The results preliminarily prove that 1D grating fabricated by laser-focused atomic deposition has good uniformity, and has great potential to become nanometric reference material for AFM and scanning electron microscope (SEM) calibration.
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Jie Liu, Jie Liu, Xinbin Cheng, Xinbin Cheng, Jie Chen, Jie Chen, Xingrui Wang, Xingrui Wang, Xiao Deng, Xiao Deng, Yan Ma, Yan Ma, Tongbao Li, Tongbao Li, "Characterization of one-dimensional gratings fabricated by laser-focused atomic deposition", Proc. SPIE 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, 99270K (15 September 2016); doi: 10.1117/12.2235906; https://doi.org/10.1117/12.2235906
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