Photovoltaic effects as the physical basis of a new generation of microelectromechanical sensors and systems (MEMS)

Boris Oskolkov; Oleg Filonov; Nikolay Prussak

doi:10.1117/12.2236183

15 September 2016 Photovoltaic effects as the physical basis of a new generation of microelectromechanical sensors and systems (MEMS)

Boris Oskolkov, Oleg Filonov, Nikolay Prussak

Author Affiliations +

Proceedings Volume 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII; 99271B (2016) https://doi.org/10.1117/12.2236183
Event: SPIE Nanoscience + Engineering, 2016, San Diego, California, United States

Abstract

The paper analyzes the prospects for the creation of a fundamentally new class of MEMS, which are based on the use of the photovoltaic effects of Dember, Kikoin – Noskov, photopiezoelectric effect in semiconductors for measuring various physical quantities. Different variants of designs of sensors, which are allowing their technical implementation without making fundamental changes in the existing technology have been reviewed. It is shown that the sensors based on photovoltaic effects are high-tech products, which is provided including extreme simplicity of the construction and technological route of their manufacture. An experiment proves the consistency was conducted photopiezoelectric effect and its use in sensor design based on it. The main problems that will require considerable effort on the part of developers and constructors of these products are likely to be associated with the processing of the output signal and increasing the sensitivity of the sensor to the measured physical quantities.

Citation Download Citation

Boris Oskolkov, Oleg Filonov, and Nikolay Prussak "Photovoltaic effects as the physical basis of a new generation of microelectromechanical sensors and systems (MEMS)", Proc. SPIE 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, 99271B (15 September 2016); https://doi.org/10.1117/12.2236183

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