High resolution measurement of water levels in optical components

Fabian N. Murrieta-Rico; Vitalii Petranovskii; Oleg Sergiyenko; Daniel Hernandez-Balbuena; Oscar Raymond-Herrera

doi:10.1117/12.2238849

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15 September 2016 High resolution measurement of water levels in optical components

Fabian N. Murrieta-Rico, Vitalii Petranovskii, Oleg Sergiyenko, Daniel Hernandez-Balbuena, Oscar Raymond-Herrera

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Proceedings Volume 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII; 99271K (2016) https://doi.org/10.1117/12.2238849
Event: SPIE Nanoscience + Engineering, 2016, San Diego, California, United States

Abstract

Systems for optical analysis use vacuum chambers, where low pressures are reached. Remaining water molecules are the prevalent contaminant in high vacuum chambers. For this reason measurement of water levels is an important task that allows correct equipment operation. In this work, a different approach is presented for detecting and quantifying the water molecules inside a the vacuum chamber used in optical systems. A zeolite coated quartz crystal microbalance is used for detecting the water molecules, and the change in the resonance frequency is measured using a novel technique known as the principle of rational approximations. Theoretical results show how nanograms of adsorbed molecules are measured, and the number of molecules are quantified.

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Fabian N. Murrieta-Rico, Vitalii Petranovskii, Oleg Sergiyenko, Daniel Hernandez-Balbuena, and Oscar Raymond-Herrera "High resolution measurement of water levels in optical components", Proc. SPIE 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, 99271K (15 September 2016); https://doi.org/10.1117/12.2238849

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