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6 December 1988 Buried Waveguides Produced By A One-Step Field-Assisted Ag+ Ion-Exchange In Glass
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Proceedings Volume 0993, Integrated Optical Circuit Engineering VI; (1988)
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States
Common techniques for the fabrication of low-loss integrated optical components use two different steps for waveguide-burial. To perform a burial in only one step we examined the ion-exchange from solid-phase silverstripes into glass, covered by an eutecticum of NaNO3/KNO3 melt. Vapor deposited silver could well be structured chemically down to lateral dimensions of 2 um, thus allowing the fabrication of multimode and single mode strip-waveguides. Satisfying waveguide characteristics were achieved by a field assisted ion exchange (elec-tric field > 150 V/mm). This technique offers the advantage of only small increase in lateral cross section, even in the case of deep burial (10 4m). Therefore an independent control of both lateral and vertical waveguide-dimensions is possible, if the dissolution rate of silver for the used type of glass is known. Due to this fact buried waveguides with nearly circular cross-section can be fabricated in only one step. In our experiments a circularity of 92 % was achieved.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Gunther and D. Jestel "Buried Waveguides Produced By A One-Step Field-Assisted Ag+ Ion-Exchange In Glass", Proc. SPIE 0993, Integrated Optical Circuit Engineering VI, (6 December 1988);


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