Translator Disclaimer
30 September 2016 Multiple beam ptychography for large field of view imaging
Author Affiliations +
We present an extension of ptychography coherent diffractive imaging that enables simultaneous imaging of several areas of an extended sample using multiple, spatially separated interfering beams. We show that this technique will increase the throughput of an imaging system by a factor that is equal to the number of beams used. This allows for the acquisition of large field of view images with near diffraction-limited resolution without an increase in data acquisition. This represents a significant step towards large field of view, high resolution imaging in the EUV and x-ray energy regimes.
Conference Presentation
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles Bevis, Robert Karl Jr., Jonathan Reichanadter, Dennis F. Gardner, Christina Porter, Elisabeth Shanblatt, Michael Tanksalvala, Giulia F. Mancini, Margaret Murnane, Henry Kapteyn, and Daniel Adams "Multiple beam ptychography for large field of view imaging", Proc. SPIE 9948, Novel Optical Systems Design and Optimization XIX, 99480U (30 September 2016);

Back to Top