30 September 2016 Multiple beam ptychography for large field of view imaging
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Abstract
We present an extension of ptychography coherent diffractive imaging that enables simultaneous imaging of several areas of an extended sample using multiple, spatially separated interfering beams. We show that this technique will increase the throughput of an imaging system by a factor that is equal to the number of beams used. This allows for the acquisition of large field of view images with near diffraction-limited resolution without an increase in data acquisition. This represents a significant step towards large field of view, high resolution imaging in the EUV and x-ray energy regimes.
Conference Presentation
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Charles Bevis, Charles Bevis, Robert Karl, Robert Karl, Jonathan Reichanadter, Jonathan Reichanadter, Dennis F. Gardner, Dennis F. Gardner, Christina Porter, Christina Porter, Elisabeth Shanblatt, Elisabeth Shanblatt, Michael Tanksalvala, Michael Tanksalvala, Giulia F. Mancini, Giulia F. Mancini, Margaret Murnane, Margaret Murnane, Henry Kapteyn, Henry Kapteyn, Daniel Adams, Daniel Adams, "Multiple beam ptychography for large field of view imaging", Proc. SPIE 9948, Novel Optical Systems Design and Optimization XIX, 99480U (30 September 2016); doi: 10.1117/12.2236242; https://doi.org/10.1117/12.2236242
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