19 September 2016 Ga2O3 as both gate dielectric and surface passivation via sol-gel method at room ambient
Author Affiliations +
We report the use of sol-gel method at room ambient to grow nanoscale thin film of Ga2O3 on Si surface for both surface passivation and gate dielectric. The admittance measurements were carried out in the frequency range of 20 kHz-1 MHz at room temperature. Voltage dependent profile of interfacial trap density (Dit) was obtained by using low and high frequency capacitance method. The capacitance (C)-voltage (V) analyses show that the structures have a low interfacial trap density (Dit) of 1x1012 cm-2eV-1. The Ga2O3 thin film synthesized via sol-gel method directly on devices to function as a gate dielectric film is found to be very effective. We also present our experimental results for a number of gate dielectric and device passivation applications.
Conference Presentation
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ahmet Kaya, Ahmet Kaya, Jianyi Gao, Jianyi Gao, Hilal Cansızoglu, Hilal Cansızoglu, Ahmed S. Mayet, Ahmed S. Mayet, Hasina H. Mamtaz, Hasina H. Mamtaz, Soroush GhandiParsi, Soroush GhandiParsi, Srabanti Chowdhury, Srabanti Chowdhury, M. Saif Islam, M. Saif Islam, "Ga2O3 as both gate dielectric and surface passivation via sol-gel method at room ambient", Proc. SPIE 9957, Wide Bandgap Power Devices and Applications, 995709 (19 September 2016); doi: 10.1117/12.2239177; https://doi.org/10.1117/12.2239177


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