7 September 2016 A 3D translation stage calibrated with Michelson interferometers
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Abstract
A 3D translation stage which meets the requirement of the next-generation lithography is proposed. The Michelson interferometer is used to evaluate the moving distance for this 3-dimensional translation stage. With the help of Michelson interferometer, accuracy in the order of nanometers is desirable.
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Hui-Hung Lin, Hui-Hung Lin, Kuo-Kai Hung, Kuo-Kai Hung, Lu-Yu Wang, Lu-Yu Wang, Wei-Hung Su, Wei-Hung Su, } "A 3D translation stage calibrated with Michelson interferometers", Proc. SPIE 9958, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X, 99581A (7 September 2016); doi: 10.1117/12.2240068; https://doi.org/10.1117/12.2240068
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