7 September 2016 High precision optical measurement of displacement and simultaneous determinations of piezoelectric coefficients
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Abstract
PZT are also well known for their applications in Micro Electrical Mechanical Systems (MEMS). It is necessary to study the piezoelectric coefficients of the materials accurately in order to design a sensor as an example, which defines their strain dependent applications. Systematic study of the electro mechanic displacement measurement was conducted and compared using a white light fiber optic sensor, a heterodyne laser Doppler vibrometer, and a homodyne laser interferometry setup. Frequency dependent measurement is conducted to evaluate displacement values well below and near the piezoelectric resonances. UHF-120 ultra-high frequency Vibrometer is used to measure the longitudinal piezoelectric displacement or x33 and the MTI 2000 FotonicTM Sensor is used to measure the transverse piezoelectric displacement or x11 over 100Hz to 2MHz. A Multiphysics Finite Element Analysis method, COMSOL, is also adopted in the study to generate a three dimensional electromechanical coupled model based on experimentally determined strains x33 and x11 as a function of frequency of the electric field applied. The full family of piezoelectric coefficients of the poled electronic ceramic PZT, d33, d31, and d15, can be then derived, upon satisfactory simulation of the COMSOL. This is achieved without the usual need of preparation of piezoelectric resonators of fundamental longitudinal, transversal, and shear modes respectively.
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Bryan M. Gamboa, Madhuri Malladi, Ramya Vadlamani, Ruyan Guo, Amar Bhalla, "High precision optical measurement of displacement and simultaneous determinations of piezoelectric coefficients", Proc. SPIE 9958, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X, 99581E (7 September 2016); doi: 10.1117/12.2249422; https://doi.org/10.1117/12.2249422
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