28 August 2016 Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter
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Abstract
Wire grid polarizers (WGP), are sub-wavelength gratings with applications in display projection system due to their compact size, wide field of view and long-term stability. Measurement and testing of these structures are important to optimize their use. This is done by first measuring the Mueller Matrix of the WGP using a Mueller Matrix Polarimeter. Next the Finite Difference Time Domain (FDTD) method is used to simulate a similar Mueller matrix thus providing the period and step height of the WGP. This approach may lead to more generic determination of sub-wavelength structures including diffractive optical structures.
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Achyut Adhikari, Achyut Adhikari, Kapil Dev, Kapil Dev, Anand Asundi, Anand Asundi, } "Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter", Proc. SPIE 9960, Interferometry XVIII, 99600F (28 August 2016); doi: 10.1117/12.2240639; https://doi.org/10.1117/12.2240639
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