8 September 2016 Development of a long trace profiler at SPring-8 using a newly developed slope sensor
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The long trace profiler (LTP) at SPring-8 has been upgraded using a newly developed laser-based slope sensor for precise measurements with high spatial resolution. Simulations of centroid calculation in the slope sensor have been performed to evaluate the ultimate accuracy of slope measurement. A performance test of the LTP has also been performed, and a spatial resolution of 0.6 mm has been confirmed.
Conference Presentation
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Y. Senba, Y. Senba, H. Kishimoto, H. Kishimoto, T. Miura, T. Miura, H. Ohashi, H. Ohashi, } "Development of a long trace profiler at SPring-8 using a newly developed slope sensor", Proc. SPIE 9962, Advances in Metrology for X-Ray and EUV Optics VI, 996204 (8 September 2016); doi: 10.1117/12.2239394; https://doi.org/10.1117/12.2239394


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