Development of metrology for one-meter-long mirrors
(Conference Presentation)

Shinya Aono; Hiroki Nakamori; Akihiko Ueda; Takashi Tsumra; Hiromi Okada

doi:10.1117/12.2239396

2 November 2016 Development of metrology for one-meter-long mirrors (Conference Presentation)

Shinya Aono; Hiroki Nakamori; Akihiko Ueda; Takashi Tsumra; Hiromi Okada

Author Affiliations +

Proceedings Volume 9962, Advances in Metrology for X-Ray and EUV Optics VI; 996209 (2016) https://doi.org/10.1117/12.2239396
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

We fabricate ultra-precision mirrors, Osaka Mirror, for synchrotron facilities. In order to fabricate them, it is very important to measure mirror surface precisely. In respect of the importance, we use two kinds of metrology, RADSI and MSI, developed by Osaka University. We have delivered more than 300 mirrors to synchrotron facilities all over the world since 2006 and our mirrors have produced excellent results to many researchers. As the demand on one meter long mirrors has increased lately, we developed RADSI and MSI systems which are capable in precise measurement of such long mirrors.

Conference Presentation

Citation Download Citation

Shinya Aono, Shinya Aono, Hiroki Nakamori, Hiroki Nakamori, Akihiko Ueda, Akihiko Ueda, Takashi Tsumra, Takashi Tsumra, Hiromi Okada, Hiromi Okada, } "Development of metrology for one-meter-long mirrors (Conference Presentation)", Proc. SPIE 9962, Advances in Metrology for X-Ray and EUV Optics VI, 996209 (2 November 2016); doi: 10.1117/12.2239396; https://doi.org/10.1117/12.2239396

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