9 September 2016 Design and implementation of precise x-ray metrology to control a 45-cm long x-ray deformable mirror
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Abstract
Our experiments at beamline 5.3.1 of the Advanced Light Source feature a 45-cm long x-ray deformable mirror (XDM). We describe the experiment and present recent results in two areas. First, we directly image the 3 keV x-ray beam and demonstrate customized shaping of its intensity in the near field. Detailed physics simulations of the experiment agree very well with actual measurements. Second, we use a grating interferometer to measure known figure errors applied to the surface of the XDM. A relative height change on the XDM of 2.5 nm RMS is measured at an SNR of eight in single measurement. A provisional error budget analysis indicates that uncalibrated errors in the system are by far the largest component.
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Lisa A. Poyneer, Jaime Ruz Armendariz, Jun Feng, Weilun Chao, Jessie Jackson, James Nasiatka, Todd Decker, "Design and implementation of precise x-ray metrology to control a 45-cm long x-ray deformable mirror", Proc. SPIE 9965, Adaptive X-Ray Optics IV, 99650G (9 September 2016); doi: 10.1117/12.2236568; https://doi.org/10.1117/12.2236568
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