Fabrication of LiNbO3-As2S3 waveguides for beam steering applications

Dwayne D. Macik; Christi K. Madsen

doi:10.1117/12.2237806

14 September 2016 Fabrication of LiNbO₃-As₂S₃ waveguides for beam steering applications

Dwayne D. Macik, Christi K. Madsen

Proceedings Volume 9970, Optics and Photonics for Information Processing X; 99700H (2016) https://doi.org/10.1117/12.2237806
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

A hybrid annealed proton exchange (APE) waveguide with a vertically integrated arsenic trisulfide (As₂S₃) waveguide on a lithium niobate (LiNbO₃) substrate is used to create an optical phased array (OPA) that allows for the non-mechanical steering of 1550 nm light on an integrated optic platform. The high electro-optic coefficient of the x-cut y-propagating LiNbO₃ (r33 = 30.8 pm/V) is utilized by electrode structures fabricated on the LiNbO₃ substrate to create a low-power, lowloss beam steering with high-speed bandwidths, capable of 10 GHz and larger as demonstrated by commercial LiNbO₃ modulators. The As₂S₃ waveguide is introduced because of its high refractive index, which leads to a highly confined optical mode. Design and fabrication are presented for a large full width steering angle of 34°, representing an order of magnitude improvement over low-confinement, diffused LiNbO₃ waveguides and two orders of magnitude improvement over other reported LiNbO₃ OPAs.

Conference Presentation

Citation Download Citation

Dwayne D. Macik and Christi K. Madsen "Fabrication of LiNbO₃-As₂S₃ waveguides for beam steering applications", Proc. SPIE 9970, Optics and Photonics for Information Processing X, 99700H (14 September 2016); https://doi.org/10.1117/12.2237806

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