Heterogeneously integrated waveguide-coupled photodiodes on silicon-on-diamond (SOD)

Xiaojun Xie; Anand Ramaswamy; Yang Shen; Zhanyu Yang; Matt Jacob-Mitos; Ye Wang; Jizhao Zang; Erik Norberg; Greg Fish; Joe C. Campbell; Andreas Beling

doi:10.1117/12.2237851

20 September 2016 Heterogeneously integrated waveguide-coupled photodiodes on silicon-on-diamond (SOD)

Xiaojun Xie, Anand Ramaswamy, Yang Shen, Zhanyu Yang, Matt Jacob-Mitos, Ye Wang, Jizhao Zang, Erik Norberg, Greg Fish, Joe C. Campbell, Andreas Beling

Author Affiliations +

Proceedings Volume 9974, Infrared Sensors, Devices, and Applications VI; 997406 (2016) https://doi.org/10.1117/12.2237851
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

We report on InP-based high power modified uni-traveling carrier (MUTC) photodiodes heterogeneously integrated on silicon on diamond (SOD) waveguides. Typical dark currents of MUTC photodiodes on SOD waveguides are 20 nA at - 5 V bias voltage. A 50-μm long photodiode has an internal responsivity of 1.07 A/W at 1550 nm wavelength. The bandwidths of photodiodes with active areas of 14×25 μm², 14×50 μm², 14×100 μm² and 14×150 μm² are 22 GHz, 16 GHz, 10 GHz and 7 GHz, respectively. The maximum output RF powers of 14×100 μm² photodiodes are 13 dBm, 14.4 dBm and 15.3 dBm at 10 GHz, respectively. The maximum DC dissipated power is 0.67 W. To our knowledge, this is the first demonstration of III-V photodiodes integrated on SOD waveguides.

Conference Presentation

Citation Download Citation

Xiaojun Xie, Anand Ramaswamy, Yang Shen, Zhanyu Yang, Matt Jacob-Mitos, Ye Wang, Jizhao Zang, Erik Norberg, Greg Fish, Joe C. Campbell, and Andreas Beling "Heterogeneously integrated waveguide-coupled photodiodes on silicon-on-diamond (SOD)", Proc. SPIE 9974, Infrared Sensors, Devices, and Applications VI, 997406 (20 September 2016); https://doi.org/10.1117/12.2237851

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