A Versatile Excimer Laser Processing System

G . Darcy Poulin; Peter A. Eisele

doi:10.1117/12.960204

16 December 1988 A Versatile Excimer Laser Processing System

G . Darcy Poulin, Peter A. Eisele

Proceedings Volume 0998, Excimer Beam Applications; (1988) https://doi.org/10.1117/12.960204
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States

Abstract

Excimer lasers are proving to be a unique and versatile tool in any materials processing applications. This paper reviews briefly. some of the fundamental aspects of excimer laser processing, and describes a general purpose excimer laser workstation. Examples of several relevant application areas are also discussed.

Citation Download Citation

G . Darcy Poulin and Peter A. Eisele "A Versatile Excimer Laser Processing System", Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); https://doi.org/10.1117/12.960204

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