Incorporating Beam Diagnostics Into UV Laser Delivery Systems

W . B . Telfair; P. R. Yoder Jr.; C. A. Martin; R. L. Labinger; W. C. Fricke

doi:10.1117/12.960208

16 December 1988 Incorporating Beam Diagnostics Into UV Laser Delivery Systems

W . B . Telfair, P. R. Yoder Jr., C. A. Martin, R. L. Labinger, W. C. Fricke

Proceedings Volume 0998, Excimer Beam Applications; (1988) https://doi.org/10.1117/12.960208
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States

Abstract

Optimum performance of a laser beam delivery system can generally be achieved only if key parameters are well known and controlled in real time or, at least, quasi-real time. Parameters of importance in typical applications of excimer lasers include energy delivered per pulse, size and shape of the beam, distribution of intensity over the beam's cross section, and the instantaneous and average location of the beam with respect to a target. The stability of each of these parameters over time is also of great importance. To maximize repeatability and uniformity of the laser system's performance, diagnostic measurement equipment should be integrated into the laser and beam delivery system itself. To maximize reliability of the measurement, it should be traceable to NBS standards. In this paper, selected techniques for accomplishing the desired diagnostic measurements are described briefly and hardware implications of incorporating diagnostic subsystems into typical beam delivery systems are discussed.

Citation Download Citation

W . B . Telfair, P. R. Yoder Jr., C. A. Martin, R. L. Labinger, and W. C. Fricke "Incorporating Beam Diagnostics Into UV Laser Delivery Systems", Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); https://doi.org/10.1117/12.960208

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