KrF Laser Induced Color Centers In Commercial Fused Silicas

Gary C. Escher

doi:10.1117/12.960206

16 December 1988 KrF Laser Induced Color Centers In Commercial Fused Silicas

Gary C. Escher

Proceedings Volume 0998, Excimer Beam Applications; (1988) https://doi.org/10.1117/12.960206
Event: O-E/Fiber LASE '88, 1988, Boston, MA, United States

Abstract

This paper provides an overview of color center generation mechanisms in fused silica. Recent results obtained at Bell Laboratories, and elsewhere, proving the existence of excimer laser induced color centers are summarized. The impact of color centers on emerging DUV technologies are discussed, with regard to possible system power restrictions for acceptable optical lifetimes.

Citation Download Citation

Gary C. Escher "KrF Laser Induced Color Centers In Commercial Fused Silicas", Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); https://doi.org/10.1117/12.960206

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