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22 July 2016 Ion-assisted coating for large-scale Bimorph deformable mirror
Takuya Mikami, Takayuki Okamoto, Kunio Yoshida, Takahisa Jitsuno, Shinji Motokoshi, Vadim V. Samarkin, Alexis V. Kudryashov, Junji Kawanaka, Noriaki Miyanaga
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Proceedings Volume 9983, Pacific Rim Laser Damage 2016: Optical Materials for High-Power Lasers; 99830B (2016) https://doi.org/10.1117/12.2239479
Event: Pacific Rim Laser Damage 2016: Optical Materials for High Power Lasers, 2016, Yokohama, Japan
Abstract
We have fabricated a 410 x 468 mm size deformable mirror with 100 Bimorph piezoceramic actuators for the LFEX laser system at Osaka University. In the case of Bimorph-type deformable mirrors, the mirror surface had to be polished and coated after bonding the piezoceramic actuators to the rear side of the thin mirror substrate. This provides a good surface figure, but the coating temperature for the high-reflection mirror was strictly limited because of the thermal fragility of piezoceramic actuators. The mirror substrate with the actuators was polished, and an ion-assisted multilayer dielectric coating was produced at 60 degrees Celsius with our 80-inch coating chamber. The flatness of the mirror just after coating was 7 μm, and reduced by aging to 3.2 μm when the mirror was assembled. The surface figure of the assembled mirror with 20 piezostack bonded actuators is demonstrated and a laser-induced damage threshold tested with a witness sample is also reported.
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Takuya Mikami, Takayuki Okamoto, Kunio Yoshida, Takahisa Jitsuno, Shinji Motokoshi, Vadim V. Samarkin, Alexis V. Kudryashov, Junji Kawanaka, and Noriaki Miyanaga "Ion-assisted coating for large-scale Bimorph deformable mirror", Proc. SPIE 9983, Pacific Rim Laser Damage 2016: Optical Materials for High-Power Lasers, 99830B (22 July 2016); https://doi.org/10.1117/12.2239479
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KEYWORDS
Coating
Deformable mirrors
Deformable mirrors
Actuators
Mirrors
Polishing
Surface finishing
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