22 July 2016 Ion-assisted coating for large-scale Bimorph deformable mirror
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Proceedings Volume 9983, Pacific Rim Laser Damage 2016: Optical Materials for High-Power Lasers; 99830B (2016) https://doi.org/10.1117/12.2239479
Event: Pacific Rim Laser Damage 2016: Optical Materials for High Power Lasers, 2016, Yokohama, Japan
Abstract
We have fabricated a 410 x 468 mm size deformable mirror with 100 Bimorph piezoceramic actuators for the LFEX laser system at Osaka University. In the case of Bimorph-type deformable mirrors, the mirror surface had to be polished and coated after bonding the piezoceramic actuators to the rear side of the thin mirror substrate. This provides a good surface figure, but the coating temperature for the high-reflection mirror was strictly limited because of the thermal fragility of piezoceramic actuators. The mirror substrate with the actuators was polished, and an ion-assisted multilayer dielectric coating was produced at 60 degrees Celsius with our 80-inch coating chamber. The flatness of the mirror just after coating was 7 μm, and reduced by aging to 3.2 μm when the mirror was assembled. The surface figure of the assembled mirror with 20 piezostack bonded actuators is demonstrated and a laser-induced damage threshold tested with a witness sample is also reported.
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Takuya Mikami, Takuya Mikami, Takayuki Okamoto, Takayuki Okamoto, Kunio Yoshida, Kunio Yoshida, Takahisa Jitsuno, Takahisa Jitsuno, Shinji Motokoshi, Shinji Motokoshi, Vadim V. Samarkin, Vadim V. Samarkin, Alexis V. Kudryashov, Alexis V. Kudryashov, Junji Kawanaka, Junji Kawanaka, Noriaki Miyanaga, Noriaki Miyanaga, "Ion-assisted coating for large-scale Bimorph deformable mirror", Proc. SPIE 9983, Pacific Rim Laser Damage 2016: Optical Materials for High-Power Lasers, 99830B (22 July 2016); doi: 10.1117/12.2239479; https://doi.org/10.1117/12.2239479
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