Contamination of optics observed in LFEX compression chamber was a critical problem for maintaining high damage
threshold and high optical performance for mirrors and gratings in the vacuum environments. We conducted a study for
understanding this problem, and we found important knowledge on the nature of contamination, namely materials of
contaminants, source of contamination, the invasion mechanism, and removal method of contamination. We also found
the samples for the damage test is easily contaminated in the storage environment. This means the optical coating
accumulate contaminations even in the air. So we tested in-situ damage test in a gas flowing chamber with controlled
contaminants. The degradation was time-dependent phenomena, and proportional to the vapor
contaminants. Several materials were tested, and even in water vapor, the damage threshold was decreased about 10%.
We also found out two methods for removing contaminations from the coatings. According to these studies, our
conclusion is special treatments should be used for knowing the intrinsic damage threshold of the coatings.