Evaluation of the properties of the permeability film material using cellulose nanofibers

Naoto Sugino; Shinya Nakajima; Takao Kameda; Satoshi Takei; Makoto Hanabata

doi:10.1117/12.2243418

4 October 2016 Evaluation of the properties of the permeability film material using cellulose nanofibers

Naoto Sugino, Shinya Nakajima, Takao Kameda, Satoshi Takei, Makoto Hanabata

Proceedings Volume 9985, Photomask Technology 2016; 99851I (2016) https://doi.org/10.1117/12.2243418
Event: SPIE Photomask Technology, 2016, San Jose, California, United States

Abstract

In order to enable the large-area patterning of micro-fabrication, constant intensity will be required to the mold material. Then, we have deposited the sample was subjected to a chemical synthesis in different hydroxy propyl cellulose (HPC) viscosity, we evaluated its transferability and optical transparency. As a result of gel permeation chromatography system (GPC) measurement, we confirmed that high viscosity sample was high molecular weight in the two types of HPC with different viscosity. Further, we will produce a film with the sample, we evaluated the transfer and light permeability of the film. In the evaluation of transfer properties, Regardless of the level of the viscosity of the HPC of the main raw material, the shape of the master silicon template(5μm line and space) had been transferred to the HPC template. Moreover in the evaluation of optical transparency, HPC template had about 60% of the light transmittance in the 365nm wavelength. The sample have a possibility to improve the strength to be polymerized, and a high optical transparency, it used in this study is expected to be a mold material for UV nano-imprint lithography.

Citation Download Citation

Naoto Sugino, Shinya Nakajima, Takao Kameda, Satoshi Takei, and Makoto Hanabata "Evaluation of the properties of the permeability film material using cellulose nanofibers", Proc. SPIE 9985, Photomask Technology 2016, 99851I (4 October 2016); https://doi.org/10.1117/12.2243418

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