Translator Disclaimer
Paper
4 October 2016 Evaluation of the properties of the permeability film material using cellulose nanofibers
Author Affiliations +
Abstract
In order to enable the large-area patterning of micro-fabrication, constant intensity will be required to the mold material. Then, we have deposited the sample was subjected to a chemical synthesis in different hydroxy propyl cellulose (HPC) viscosity, we evaluated its transferability and optical transparency. As a result of gel permeation chromatography system (GPC) measurement, we confirmed that high viscosity sample was high molecular weight in the two types of HPC with different viscosity. Further, we will produce a film with the sample, we evaluated the transfer and light permeability of the film. In the evaluation of transfer properties, Regardless of the level of the viscosity of the HPC of the main raw material, the shape of the master silicon template(5μm line and space) had been transferred to the HPC template. Moreover in the evaluation of optical transparency, HPC template had about 60% of the light transmittance in the 365nm wavelength. The sample have a possibility to improve the strength to be polymerized, and a high optical transparency, it used in this study is expected to be a mold material for UV nano-imprint lithography.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Naoto Sugino, Shinya Nakajima, Takao Kameda, Satoshi Takei, and Makoto Hanabata "Evaluation of the properties of the permeability film material using cellulose nanofibers", Proc. SPIE 9985, Photomask Technology 2016, 99851I (4 October 2016); https://doi.org/10.1117/12.2243418
PROCEEDINGS
6 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Nanoimprint lithography using disposable biomass template
Proceedings of SPIE (April 01 2016)
Nanoimprint lithography using gas permeable template
Proceedings of SPIE (March 27 2017)
Nanoimprint lithography using gas permeable template II
Proceedings of SPIE (March 19 2018)
Nanoimprint lithography techniques: an introduction
Proceedings of SPIE (June 21 2006)
Nanoimprint technology and its applications
Proceedings of SPIE (April 04 2005)
Mix and match of nanoimprint and UV lithography
Proceedings of SPIE (August 20 2001)

Back to Top