In order to enable the large-area patterning of micro-fabrication, constant intensity will be required to the mold material.
Then, we have deposited the sample was subjected to a chemical synthesis in different hydroxy propyl cellulose (HPC)
viscosity, we evaluated its transferability and optical transparency. As a result of gel permeation chromatography system
(GPC) measurement, we confirmed that high viscosity sample was high molecular weight in the two types of HPC with
different viscosity. Further, we will produce a film with the sample, we evaluated the transfer and light permeability of
the film. In the evaluation of transfer properties, Regardless of the level of the viscosity of the HPC of the main raw
material, the shape of the master silicon template(5μm line and space) had been transferred to the HPC template.
Moreover in the evaluation of optical transparency, HPC template had about 60% of the light transmittance in the 365nm
wavelength. The sample have a possibility to improve the strength to be polymerized, and a high optical transparency, it
used in this study is expected to be a mold material for UV nano-imprint lithography.